12/3/2011	12:18:40 AM	Helium valve closed
12/3/2011	12:18:40 AM	PH3 valve closed
12/3/2011	12:18:40 AM	Main Vac valve closed
12/3/2011	12:18:40 AM	Bypass valve closed
12/3/2011	12:18:40 AM	H2 valve opened
12/3/2011	12:18:40 AM	BCl3 valve opened
12/3/2011	12:18:40 AM	SiCl4 pre valve opened
12/3/2011	12:18:40 AM	SiCl4 post valve opened
12/3/2011	12:18:40 AM	Bubbler valve opened
12/3/2011	12:18:40 AM	Helium MFC set to  0.000000
12/3/2011	12:18:40 AM	H2 MFC set to  450.000000
12/3/2011	12:18:40 AM	BCl3 MFC set to  1.500000
12/3/2011	12:18:40 AM	PHl3 MFC set to  0.000000
12/3/2011	12:18:40 AM	SiCl4 MFC set to  50.000000
12/3/2011	12:18:40 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	12:18:40 AM	Tube furnace set to 1000
12/3/2011	1:08:40 AM	Helium valve closed
12/3/2011	1:08:40 AM	BCl3 valve closed
12/3/2011	1:08:40 AM	PH3 valve closed
12/3/2011	1:08:40 AM	SiCl4 pre valve closed
12/3/2011	1:08:40 AM	SiCl4 post valve closed
12/3/2011	1:08:40 AM	Main Vac valve closed
12/3/2011	1:08:40 AM	Bypass valve closed
12/3/2011	1:08:40 AM	H2 valve opened
12/3/2011	1:08:40 AM	Bubbler valve opened
12/3/2011	1:08:40 AM	Helium MFC set to  0.000000
12/3/2011	1:08:40 AM	H2 MFC set to  500.000000
12/3/2011	1:08:40 AM	BCl3 MFC set to  0.000000
12/3/2011	1:08:40 AM	PHl3 MFC set to  0.000000
12/3/2011	1:08:40 AM	SiCl4 MFC set to  0.000000
12/3/2011	1:08:40 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:08:40 AM	Tube furnace set to 750
12/3/2011	1:23:40 AM	H2 valve closed
12/3/2011	1:23:40 AM	BCl3 valve closed
12/3/2011	1:23:40 AM	PH3 valve closed
12/3/2011	1:23:40 AM	SiCl4 pre valve closed
12/3/2011	1:23:40 AM	SiCl4 post valve closed
12/3/2011	1:23:40 AM	Main Vac valve closed
12/3/2011	1:23:40 AM	Bypass valve closed
12/3/2011	1:23:40 AM	Helium valve opened
12/3/2011	1:23:40 AM	Bubbler valve opened
12/3/2011	1:23:40 AM	Helium MFC set to  500.000000
12/3/2011	1:23:40 AM	H2 MFC set to  0.000000
12/3/2011	1:23:40 AM	BCl3 MFC set to  0.000000
12/3/2011	1:23:40 AM	PHl3 MFC set to  0.000000
12/3/2011	1:23:40 AM	SiCl4 MFC set to  0.000000
12/3/2011	1:23:40 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:23:40 AM	Tube furnace set to 0
12/3/2011	1:43:40 AM	Helium valve closed
12/3/2011	1:43:40 AM	H2 valve closed
12/3/2011	1:43:40 AM	BCl3 valve closed
12/3/2011	1:43:40 AM	PH3 valve closed
12/3/2011	1:43:40 AM	SiCl4 pre valve closed
12/3/2011	1:43:40 AM	SiCl4 post valve closed
12/3/2011	1:43:40 AM	Main Vac valve closed
12/3/2011	1:43:40 AM	Bypass valve closed
12/3/2011	1:43:40 AM	Bubbler valve closed
12/3/2011	1:43:40 AM	Helium MFC set to  0.000000
12/3/2011	1:43:40 AM	H2 MFC set to  0.000000
12/3/2011	1:43:40 AM	BCl3 MFC set to  0.000000
12/3/2011	1:43:40 AM	PHl3 MFC set to  0.000000
12/3/2011	1:43:40 AM	SiCl4 MFC set to  0.000000
12/3/2011	1:43:40 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:43:40 AM	Tube furnace set to 0
12/3/2011	2:03:40 AM	Helium valve closed
12/3/2011	2:03:40 AM	H2 valve closed
12/3/2011	2:03:40 AM	BCl3 valve closed
12/3/2011	2:03:40 AM	PH3 valve closed
12/3/2011	2:03:40 AM	SiCl4 pre valve closed
12/3/2011	2:03:40 AM	SiCl4 post valve closed
12/3/2011	2:03:40 AM	Main Vac valve closed
12/3/2011	2:03:40 AM	Bubbler valve closed
12/3/2011	2:03:40 AM	Bypass valve opened
12/3/2011	2:03:40 AM	Helium MFC set to  0.000000
12/3/2011	2:03:40 AM	H2 MFC set to  0.000000
12/3/2011	2:03:40 AM	BCl3 MFC set to  0.000000
12/3/2011	2:03:40 AM	PHl3 MFC set to  0.000000
12/3/2011	2:03:40 AM	SiCl4 MFC set to  0.000000
12/3/2011	2:03:40 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	2:03:40 AM	Tube furnace set to 0
12/3/2011	2:05:42 AM	Helium valve closed
12/3/2011	2:05:42 AM	H2 valve closed
12/3/2011	2:05:42 AM	BCl3 valve closed
12/3/2011	2:05:42 AM	PH3 valve closed
12/3/2011	2:05:42 AM	SiCl4 pre valve closed
12/3/2011	2:05:42 AM	SiCl4 post valve closed
12/3/2011	2:05:42 AM	Main Vac valve closed
12/3/2011	2:05:42 AM	Bubbler valve closed
12/3/2011	2:05:42 AM	Bypass valve opened
12/3/2011	2:05:42 AM	Helium MFC set to  0.000000
12/3/2011	2:05:42 AM	H2 MFC set to  0.000000
12/3/2011	2:05:42 AM	BCl3 MFC set to  0.000000
12/3/2011	2:05:42 AM	PHl3 MFC set to  0.000000
12/3/2011	2:05:42 AM	SiCl4 MFC set to  0.000000
12/3/2011	2:05:42 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	2:05:42 AM	Tube furnace set to 0
12/3/2011	2:06:42 AM	Helium valve closed
12/3/2011	2:06:42 AM	H2 valve closed
12/3/2011	2:06:42 AM	BCl3 valve closed
12/3/2011	2:06:42 AM	PH3 valve closed
12/3/2011	2:06:42 AM	SiCl4 pre valve closed
12/3/2011	2:06:42 AM	SiCl4 post valve closed
12/3/2011	2:06:42 AM	Bypass valve closed
12/3/2011	2:06:42 AM	Bubbler valve closed
12/3/2011	2:06:42 AM	Main Vac valve opened
12/3/2011	2:06:42 AM	Helium MFC set to  0.000000
12/3/2011	2:06:42 AM	H2 MFC set to  0.000000
12/3/2011	2:06:42 AM	BCl3 MFC set to  0.000000
12/3/2011	2:06:42 AM	PHl3 MFC set to  0.000000
12/3/2011	2:06:42 AM	SiCl4 MFC set to  0.000000
12/3/2011	2:06:42 AM	Bypass solenoid MFC set to  0.000000
12/3/2011	2:06:42 AM	Tube furnace set to 0
12/3/2011	3:06:43 AM	Run finished at 3:06 AM
12/3/2011	1:32:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2011	1:32:36 PM	Recipe started at 1:32 PM
12/3/2011	1:32:36 PM	Helium valve closed
12/3/2011	1:32:36 PM	H2 valve closed
12/3/2011	1:32:36 PM	BCl3 valve closed
12/3/2011	1:32:36 PM	PH3 valve closed
12/3/2011	1:32:36 PM	SiCl4 pre valve closed
12/3/2011	1:32:36 PM	SiCl4 post valve closed
12/3/2011	1:32:36 PM	Main Vac valve closed
12/3/2011	1:32:36 PM	Bypass valve closed
12/3/2011	1:32:36 PM	Bubbler valve closed
12/3/2011	1:32:36 PM	Helium MFC set to  0.000000
12/3/2011	1:32:36 PM	H2 MFC set to  0.000000
12/3/2011	1:32:36 PM	BCl3 MFC set to  0.000000
12/3/2011	1:32:36 PM	PHl3 MFC set to  0.000000
12/3/2011	1:32:36 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:32:36 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:32:36 PM	Tube furnace set to 0
12/3/2011	1:32:39 PM	H2 valve closed
12/3/2011	1:32:39 PM	BCl3 valve closed
12/3/2011	1:32:39 PM	PH3 valve closed
12/3/2011	1:32:39 PM	SiCl4 pre valve closed
12/3/2011	1:32:39 PM	SiCl4 post valve closed
12/3/2011	1:32:39 PM	Main Vac valve closed
12/3/2011	1:32:39 PM	Bypass valve closed
12/3/2011	1:32:39 PM	Bubbler valve closed
12/3/2011	1:32:39 PM	Helium valve opened
12/3/2011	1:32:39 PM	Helium MFC set to  500.000000
12/3/2011	1:32:39 PM	H2 MFC set to  0.000000
12/3/2011	1:32:39 PM	BCl3 MFC set to  0.000000
12/3/2011	1:32:39 PM	PHl3 MFC set to  0.000000
12/3/2011	1:32:39 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:32:39 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:32:40 PM	Tube furnace set to 0
12/3/2011	1:33:45 PM	Helium valve closed
12/3/2011	1:33:45 PM	H2 valve closed
12/3/2011	1:33:45 PM	BCl3 valve closed
12/3/2011	1:33:45 PM	PH3 valve closed
12/3/2011	1:33:45 PM	SiCl4 pre valve closed
12/3/2011	1:33:45 PM	SiCl4 post valve closed
12/3/2011	1:33:45 PM	Main Vac valve closed
12/3/2011	1:33:45 PM	Bypass valve closed
12/3/2011	1:33:45 PM	Bubbler valve closed
12/3/2011	1:33:45 PM	Helium MFC set to  0.000000
12/3/2011	1:33:45 PM	H2 MFC set to  0.000000
12/3/2011	1:33:45 PM	BCl3 MFC set to  0.000000
12/3/2011	1:33:45 PM	PHl3 MFC set to  0.000000
12/3/2011	1:33:45 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:33:45 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:33:45 PM	Tube furnace set to 0
12/3/2011	1:33:46 PM	Run finished at 1:33 PM
12/3/2011	1:33:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2011	1:38:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2011	1:38:08 PM	Recipe started at 1:38 PM
12/3/2011	1:38:08 PM	Helium valve closed
12/3/2011	1:38:08 PM	H2 valve closed
12/3/2011	1:38:08 PM	BCl3 valve closed
12/3/2011	1:38:08 PM	PH3 valve closed
12/3/2011	1:38:08 PM	SiCl4 pre valve closed
12/3/2011	1:38:08 PM	SiCl4 post valve closed
12/3/2011	1:38:08 PM	Main Vac valve closed
12/3/2011	1:38:08 PM	Bubbler valve closed
12/3/2011	1:38:08 PM	Bypass valve opened
12/3/2011	1:38:08 PM	Helium MFC set to  0.000000
12/3/2011	1:38:08 PM	H2 MFC set to  0.000000
12/3/2011	1:38:08 PM	BCl3 MFC set to  0.000000
12/3/2011	1:38:08 PM	PHl3 MFC set to  0.000000
12/3/2011	1:38:08 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:38:08 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:38:08 PM	Tube furnace set to 0
12/3/2011	1:40:00 PM	Helium valve closed
12/3/2011	1:40:00 PM	H2 valve closed
12/3/2011	1:40:00 PM	BCl3 valve closed
12/3/2011	1:40:00 PM	PH3 valve closed
12/3/2011	1:40:00 PM	SiCl4 pre valve closed
12/3/2011	1:40:00 PM	SiCl4 post valve closed
12/3/2011	1:40:00 PM	Main Vac valve closed
12/3/2011	1:40:00 PM	Bubbler valve closed
12/3/2011	1:40:00 PM	Bypass valve opened
12/3/2011	1:40:00 PM	Helium MFC set to  0.000000
12/3/2011	1:40:00 PM	H2 MFC set to  0.000000
12/3/2011	1:40:00 PM	BCl3 MFC set to  0.000000
12/3/2011	1:40:00 PM	PHl3 MFC set to  0.000000
12/3/2011	1:40:00 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:40:00 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:40:01 PM	Tube furnace set to 0
12/3/2011	1:41:01 PM	Helium valve closed
12/3/2011	1:41:01 PM	H2 valve closed
12/3/2011	1:41:01 PM	BCl3 valve closed
12/3/2011	1:41:01 PM	PH3 valve closed
12/3/2011	1:41:01 PM	SiCl4 pre valve closed
12/3/2011	1:41:01 PM	SiCl4 post valve closed
12/3/2011	1:41:01 PM	Bypass valve closed
12/3/2011	1:41:01 PM	Bubbler valve closed
12/3/2011	1:41:01 PM	Main Vac valve opened
12/3/2011	1:41:01 PM	Helium MFC set to  0.000000
12/3/2011	1:41:01 PM	H2 MFC set to  0.000000
12/3/2011	1:41:01 PM	BCl3 MFC set to  0.000000
12/3/2011	1:41:01 PM	PHl3 MFC set to  0.000000
12/3/2011	1:41:01 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:41:01 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:41:01 PM	Tube furnace set to 0
12/3/2011	1:41:02 PM	Run finished at 1:41 PM
12/3/2011	1:41:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2011	1:42:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2011	1:42:53 PM	Recipe started at 1:42 PM
12/3/2011	1:42:53 PM	Helium valve closed
12/3/2011	1:42:53 PM	H2 valve closed
12/3/2011	1:42:53 PM	BCl3 valve closed
12/3/2011	1:42:53 PM	PH3 valve closed
12/3/2011	1:42:53 PM	SiCl4 pre valve closed
12/3/2011	1:42:53 PM	SiCl4 post valve closed
12/3/2011	1:42:53 PM	Main Vac valve closed
12/3/2011	1:42:53 PM	Bypass valve closed
12/3/2011	1:42:53 PM	Bubbler valve closed
12/3/2011	1:42:53 PM	Helium MFC set to  0.000000
12/3/2011	1:42:53 PM	H2 MFC set to  0.000000
12/3/2011	1:42:53 PM	BCl3 MFC set to  0.000000
12/3/2011	1:42:53 PM	PHl3 MFC set to  0.000000
12/3/2011	1:42:53 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:42:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:42:53 PM	Tube furnace set to 0
12/3/2011	1:42:56 PM	H2 valve closed
12/3/2011	1:42:56 PM	BCl3 valve closed
12/3/2011	1:42:56 PM	PH3 valve closed
12/3/2011	1:42:56 PM	SiCl4 pre valve closed
12/3/2011	1:42:56 PM	SiCl4 post valve closed
12/3/2011	1:42:56 PM	Main Vac valve closed
12/3/2011	1:42:56 PM	Bypass valve closed
12/3/2011	1:42:56 PM	Bubbler valve closed
12/3/2011	1:42:56 PM	Helium valve opened
12/3/2011	1:42:56 PM	Helium MFC set to  500.000000
12/3/2011	1:42:56 PM	H2 MFC set to  0.000000
12/3/2011	1:42:56 PM	BCl3 MFC set to  0.000000
12/3/2011	1:42:56 PM	PHl3 MFC set to  0.000000
12/3/2011	1:42:56 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:42:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:42:56 PM	Tube furnace set to 0
12/3/2011	1:44:02 PM	Helium valve closed
12/3/2011	1:44:02 PM	H2 valve closed
12/3/2011	1:44:02 PM	BCl3 valve closed
12/3/2011	1:44:02 PM	PH3 valve closed
12/3/2011	1:44:02 PM	SiCl4 pre valve closed
12/3/2011	1:44:02 PM	SiCl4 post valve closed
12/3/2011	1:44:02 PM	Main Vac valve closed
12/3/2011	1:44:02 PM	Bypass valve closed
12/3/2011	1:44:02 PM	Bubbler valve closed
12/3/2011	1:44:02 PM	Helium MFC set to  0.000000
12/3/2011	1:44:02 PM	H2 MFC set to  0.000000
12/3/2011	1:44:02 PM	BCl3 MFC set to  0.000000
12/3/2011	1:44:02 PM	PHl3 MFC set to  0.000000
12/3/2011	1:44:02 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:44:02 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:44:02 PM	Tube furnace set to 0
12/3/2011	1:44:03 PM	Run finished at 1:44 PM
12/3/2011	1:44:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2011	1:48:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2011	1:48:10 PM	Recipe started at 1:48 PM
12/3/2011	1:48:10 PM	Helium valve closed
12/3/2011	1:48:10 PM	H2 valve closed
12/3/2011	1:48:10 PM	BCl3 valve closed
12/3/2011	1:48:10 PM	PH3 valve closed
12/3/2011	1:48:10 PM	SiCl4 pre valve closed
12/3/2011	1:48:10 PM	SiCl4 post valve closed
12/3/2011	1:48:10 PM	Main Vac valve closed
12/3/2011	1:48:10 PM	Bubbler valve closed
12/3/2011	1:48:10 PM	Bypass valve opened
12/3/2011	1:48:10 PM	Helium MFC set to  0.000000
12/3/2011	1:48:10 PM	H2 MFC set to  0.000000
12/3/2011	1:48:10 PM	BCl3 MFC set to  0.000000
12/3/2011	1:48:10 PM	PHl3 MFC set to  0.000000
12/3/2011	1:48:10 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:48:10 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:48:10 PM	Tube furnace set to 0
12/3/2011	1:49:51 PM	Helium valve closed
12/3/2011	1:49:51 PM	H2 valve closed
12/3/2011	1:49:51 PM	BCl3 valve closed
12/3/2011	1:49:51 PM	PH3 valve closed
12/3/2011	1:49:51 PM	SiCl4 pre valve closed
12/3/2011	1:49:51 PM	SiCl4 post valve closed
12/3/2011	1:49:51 PM	Main Vac valve closed
12/3/2011	1:49:51 PM	Bubbler valve closed
12/3/2011	1:49:51 PM	Bypass valve opened
12/3/2011	1:49:51 PM	Helium MFC set to  0.000000
12/3/2011	1:49:51 PM	H2 MFC set to  0.000000
12/3/2011	1:49:51 PM	BCl3 MFC set to  0.000000
12/3/2011	1:49:51 PM	PHl3 MFC set to  0.000000
12/3/2011	1:49:51 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:49:51 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:49:51 PM	Tube furnace set to 0
12/3/2011	1:50:51 PM	Helium valve closed
12/3/2011	1:50:51 PM	H2 valve closed
12/3/2011	1:50:51 PM	BCl3 valve closed
12/3/2011	1:50:51 PM	PH3 valve closed
12/3/2011	1:50:51 PM	SiCl4 pre valve closed
12/3/2011	1:50:51 PM	SiCl4 post valve closed
12/3/2011	1:50:51 PM	Bypass valve closed
12/3/2011	1:50:51 PM	Bubbler valve closed
12/3/2011	1:50:51 PM	Main Vac valve opened
12/3/2011	1:50:51 PM	Helium MFC set to  0.000000
12/3/2011	1:50:51 PM	H2 MFC set to  0.000000
12/3/2011	1:50:51 PM	BCl3 MFC set to  0.000000
12/3/2011	1:50:51 PM	PHl3 MFC set to  0.000000
12/3/2011	1:50:51 PM	SiCl4 MFC set to  0.000000
12/3/2011	1:50:51 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	1:50:51 PM	Tube furnace set to 0
12/3/2011	1:50:52 PM	Run finished at 1:50 PM
12/3/2011	1:50:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2011	3:18:45 PM	Main Vac valve closed
12/3/2011	3:19:23 PM	Main Vac valve opened
12/3/2011	3:20:30 PM	Recipe started at 3:20 PM
12/3/2011	3:20:30 PM	Helium valve closed
12/3/2011	3:20:30 PM	H2 valve closed
12/3/2011	3:20:30 PM	BCl3 valve closed
12/3/2011	3:20:30 PM	PH3 valve closed
12/3/2011	3:20:30 PM	SiCl4 pre valve closed
12/3/2011	3:20:30 PM	SiCl4 post valve closed
12/3/2011	3:20:30 PM	Bypass valve closed
12/3/2011	3:20:30 PM	Bubbler valve closed
12/3/2011	3:20:30 PM	Main Vac valve opened
12/3/2011	3:20:30 PM	Helium MFC set to  0.000000
12/3/2011	3:20:30 PM	H2 MFC set to  0.000000
12/3/2011	3:20:30 PM	BCl3 MFC set to  0.000000
12/3/2011	3:20:30 PM	PHl3 MFC set to  0.000000
12/3/2011	3:20:30 PM	SiCl4 MFC set to  0.000000
12/3/2011	3:20:30 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	3:20:30 PM	Tube furnace set to 0
12/3/2011	3:20:40 PM	Helium valve closed
12/3/2011	3:20:40 PM	H2 valve closed
12/3/2011	3:20:40 PM	BCl3 valve closed
12/3/2011	3:20:40 PM	PH3 valve closed
12/3/2011	3:20:40 PM	SiCl4 pre valve closed
12/3/2011	3:20:40 PM	SiCl4 post valve closed
12/3/2011	3:20:40 PM	Main Vac valve closed
12/3/2011	3:20:40 PM	Bypass valve closed
12/3/2011	3:20:40 PM	Bubbler valve closed
12/3/2011	3:20:40 PM	Helium MFC set to  0.000000
12/3/2011	3:20:40 PM	H2 MFC set to  0.000000
12/3/2011	3:20:40 PM	BCl3 MFC set to  0.000000
12/3/2011	3:20:40 PM	PHl3 MFC set to  0.000000
12/3/2011	3:20:40 PM	SiCl4 MFC set to  0.000000
12/3/2011	3:20:40 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	3:20:40 PM	Tube furnace set to 0
12/3/2011	3:20:43 PM	Helium valve closed
12/3/2011	3:20:43 PM	BCl3 valve closed
12/3/2011	3:20:43 PM	PH3 valve closed
12/3/2011	3:20:43 PM	SiCl4 pre valve closed
12/3/2011	3:20:43 PM	SiCl4 post valve closed
12/3/2011	3:20:43 PM	Main Vac valve closed
12/3/2011	3:20:43 PM	Bypass valve closed
12/3/2011	3:20:43 PM	Bubbler valve closed
12/3/2011	3:20:43 PM	H2 valve opened
12/3/2011	3:20:43 PM	Helium MFC set to  0.000000
12/3/2011	3:20:43 PM	H2 MFC set to  500.000000
12/3/2011	3:20:43 PM	BCl3 MFC set to  0.000000
12/3/2011	3:20:43 PM	PHl3 MFC set to  0.000000
12/3/2011	3:20:43 PM	SiCl4 MFC set to  0.000000
12/3/2011	3:20:43 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	3:20:43 PM	Tube furnace set to 0
12/3/2011	3:21:52 PM	Helium valve closed
12/3/2011	3:21:52 PM	BCl3 valve closed
12/3/2011	3:21:52 PM	PH3 valve closed
12/3/2011	3:21:52 PM	SiCl4 pre valve closed
12/3/2011	3:21:52 PM	SiCl4 post valve closed
12/3/2011	3:21:52 PM	Main Vac valve closed
12/3/2011	3:21:52 PM	Bypass valve closed
12/3/2011	3:21:52 PM	H2 valve opened
12/3/2011	3:21:52 PM	Bubbler valve opened
12/3/2011	3:21:52 PM	Helium MFC set to  0.000000
12/3/2011	3:21:52 PM	H2 MFC set to  500.000000
12/3/2011	3:21:52 PM	BCl3 MFC set to  0.000000
12/3/2011	3:21:52 PM	PHl3 MFC set to  0.000000
12/3/2011	3:21:52 PM	SiCl4 MFC set to  0.000000
12/3/2011	3:21:52 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	3:21:52 PM	Tube furnace set to 0
12/3/2011	3:21:53 PM	Helium valve closed
12/3/2011	3:21:53 PM	BCl3 valve closed
12/3/2011	3:21:53 PM	PH3 valve closed
12/3/2011	3:21:53 PM	SiCl4 pre valve closed
12/3/2011	3:21:53 PM	SiCl4 post valve closed
12/3/2011	3:21:53 PM	Main Vac valve closed
12/3/2011	3:21:53 PM	Bypass valve closed
12/3/2011	3:21:53 PM	H2 valve opened
12/3/2011	3:21:53 PM	Bubbler valve opened
12/3/2011	3:21:53 PM	Helium MFC set to  0.000000
12/3/2011	3:21:53 PM	H2 MFC set to  500.000000
12/3/2011	3:21:53 PM	BCl3 MFC set to  0.000000
12/3/2011	3:21:53 PM	PHl3 MFC set to  0.000000
12/3/2011	3:21:53 PM	SiCl4 MFC set to  0.000000
12/3/2011	3:21:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	3:21:53 PM	Tube furnace set to 1000
12/3/2011	3:46:53 PM	Helium valve closed
12/3/2011	3:46:53 PM	PH3 valve closed
12/3/2011	3:46:53 PM	Main Vac valve closed
12/3/2011	3:46:53 PM	Bypass valve closed
12/3/2011	3:46:53 PM	H2 valve opened
12/3/2011	3:46:53 PM	BCl3 valve opened
12/3/2011	3:46:53 PM	SiCl4 pre valve opened
12/3/2011	3:46:53 PM	SiCl4 post valve opened
12/3/2011	3:46:53 PM	Bubbler valve opened
12/3/2011	3:46:53 PM	Helium MFC set to  0.000000
12/3/2011	3:46:53 PM	H2 MFC set to  450.000000
12/3/2011	3:46:53 PM	BCl3 MFC set to  1.500000
12/3/2011	3:46:53 PM	PHl3 MFC set to  0.000000
12/3/2011	3:46:53 PM	SiCl4 MFC set to  50.000000
12/3/2011	3:46:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	3:46:53 PM	Tube furnace set to 1000
12/3/2011	4:36:53 PM	Helium valve closed
12/3/2011	4:36:53 PM	BCl3 valve closed
12/3/2011	4:36:53 PM	PH3 valve closed
12/3/2011	4:36:53 PM	SiCl4 pre valve closed
12/3/2011	4:36:53 PM	SiCl4 post valve closed
12/3/2011	4:36:53 PM	Main Vac valve closed
12/3/2011	4:36:53 PM	Bypass valve closed
12/3/2011	4:36:53 PM	H2 valve opened
12/3/2011	4:36:53 PM	Bubbler valve opened
12/3/2011	4:36:53 PM	Helium MFC set to  0.000000
12/3/2011	4:36:53 PM	H2 MFC set to  500.000000
12/3/2011	4:36:53 PM	BCl3 MFC set to  0.000000
12/3/2011	4:36:53 PM	PHl3 MFC set to  0.000000
12/3/2011	4:36:53 PM	SiCl4 MFC set to  0.000000
12/3/2011	4:36:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	4:36:53 PM	Tube furnace set to 750
12/3/2011	4:51:53 PM	H2 valve closed
12/3/2011	4:51:53 PM	BCl3 valve closed
12/3/2011	4:51:53 PM	PH3 valve closed
12/3/2011	4:51:53 PM	SiCl4 pre valve closed
12/3/2011	4:51:53 PM	SiCl4 post valve closed
12/3/2011	4:51:53 PM	Main Vac valve closed
12/3/2011	4:51:53 PM	Bypass valve closed
12/3/2011	4:51:53 PM	Helium valve opened
12/3/2011	4:51:53 PM	Bubbler valve opened
12/3/2011	4:51:54 PM	Helium MFC set to  500.000000
12/3/2011	4:51:54 PM	H2 MFC set to  0.000000
12/3/2011	4:51:54 PM	BCl3 MFC set to  0.000000
12/3/2011	4:51:54 PM	PHl3 MFC set to  0.000000
12/3/2011	4:51:54 PM	SiCl4 MFC set to  0.000000
12/3/2011	4:51:54 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	4:51:54 PM	Tube furnace set to 0
12/3/2011	5:11:54 PM	Helium valve closed
12/3/2011	5:11:54 PM	H2 valve closed
12/3/2011	5:11:54 PM	BCl3 valve closed
12/3/2011	5:11:54 PM	PH3 valve closed
12/3/2011	5:11:54 PM	SiCl4 pre valve closed
12/3/2011	5:11:54 PM	SiCl4 post valve closed
12/3/2011	5:11:54 PM	Main Vac valve closed
12/3/2011	5:11:54 PM	Bypass valve closed
12/3/2011	5:11:54 PM	Bubbler valve closed
12/3/2011	5:11:54 PM	Helium MFC set to  0.000000
12/3/2011	5:11:54 PM	H2 MFC set to  0.000000
12/3/2011	5:11:54 PM	BCl3 MFC set to  0.000000
12/3/2011	5:11:54 PM	PHl3 MFC set to  0.000000
12/3/2011	5:11:54 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:11:54 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:11:54 PM	Tube furnace set to 0
12/3/2011	5:31:54 PM	Helium valve closed
12/3/2011	5:31:54 PM	H2 valve closed
12/3/2011	5:31:54 PM	BCl3 valve closed
12/3/2011	5:31:54 PM	PH3 valve closed
12/3/2011	5:31:54 PM	SiCl4 pre valve closed
12/3/2011	5:31:54 PM	SiCl4 post valve closed
12/3/2011	5:31:54 PM	Main Vac valve closed
12/3/2011	5:31:54 PM	Bubbler valve closed
12/3/2011	5:31:54 PM	Bypass valve opened
12/3/2011	5:31:54 PM	Helium MFC set to  0.000000
12/3/2011	5:31:54 PM	H2 MFC set to  0.000000
12/3/2011	5:31:54 PM	BCl3 MFC set to  0.000000
12/3/2011	5:31:54 PM	PHl3 MFC set to  0.000000
12/3/2011	5:31:54 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:31:54 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:31:54 PM	Tube furnace set to 0
12/3/2011	5:33:43 PM	Helium valve closed
12/3/2011	5:33:43 PM	H2 valve closed
12/3/2011	5:33:43 PM	BCl3 valve closed
12/3/2011	5:33:43 PM	PH3 valve closed
12/3/2011	5:33:43 PM	SiCl4 pre valve closed
12/3/2011	5:33:43 PM	SiCl4 post valve closed
12/3/2011	5:33:43 PM	Main Vac valve closed
12/3/2011	5:33:43 PM	Bubbler valve closed
12/3/2011	5:33:43 PM	Bypass valve opened
12/3/2011	5:33:43 PM	Helium MFC set to  0.000000
12/3/2011	5:33:43 PM	H2 MFC set to  0.000000
12/3/2011	5:33:43 PM	BCl3 MFC set to  0.000000
12/3/2011	5:33:43 PM	PHl3 MFC set to  0.000000
12/3/2011	5:33:43 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:33:43 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:33:43 PM	Tube furnace set to 0
12/3/2011	5:33:53 PM	Run aborted at 5:33 PM
12/3/2011	5:33:53 PM	Helium valve closed
12/3/2011	5:33:53 PM	H2 valve closed
12/3/2011	5:33:53 PM	BCl3 valve closed
12/3/2011	5:33:53 PM	PH3 valve closed
12/3/2011	5:33:53 PM	SiCl4 pre valve closed
12/3/2011	5:33:53 PM	SiCl4 post valve closed
12/3/2011	5:33:53 PM	Bypass valve closed
12/3/2011	5:33:53 PM	Main Vac valve closed
12/3/2011	5:33:53 PM	Bubbler valve closed
12/3/2011	5:33:53 PM	Helium MFC set to  0.000000
12/3/2011	5:33:53 PM	H2 MFC set to  0.000000
12/3/2011	5:33:53 PM	BCl3 MFC set to  0.000000
12/3/2011	5:33:53 PM	PHl3 MFC set to  0.000000
12/3/2011	5:33:53 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:33:54 PM	Tube furnace set to 0
12/3/2011	5:33:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2011	5:33:56 PM	Recipe started at 5:33 PM
12/3/2011	5:33:56 PM	Helium valve closed
12/3/2011	5:33:56 PM	H2 valve closed
12/3/2011	5:33:56 PM	BCl3 valve closed
12/3/2011	5:33:56 PM	PH3 valve closed
12/3/2011	5:33:56 PM	SiCl4 pre valve closed
12/3/2011	5:33:56 PM	SiCl4 post valve closed
12/3/2011	5:33:56 PM	Main Vac valve closed
12/3/2011	5:33:56 PM	Bypass valve closed
12/3/2011	5:33:56 PM	Bubbler valve closed
12/3/2011	5:33:56 PM	Helium MFC set to  0.000000
12/3/2011	5:33:56 PM	H2 MFC set to  0.000000
12/3/2011	5:33:56 PM	BCl3 MFC set to  0.000000
12/3/2011	5:33:56 PM	PHl3 MFC set to  0.000000
12/3/2011	5:33:56 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:33:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:33:56 PM	Tube furnace set to 0
12/3/2011	5:33:59 PM	H2 valve closed
12/3/2011	5:33:59 PM	BCl3 valve closed
12/3/2011	5:33:59 PM	PH3 valve closed
12/3/2011	5:33:59 PM	SiCl4 pre valve closed
12/3/2011	5:33:59 PM	SiCl4 post valve closed
12/3/2011	5:33:59 PM	Main Vac valve closed
12/3/2011	5:33:59 PM	Bypass valve closed
12/3/2011	5:33:59 PM	Bubbler valve closed
12/3/2011	5:33:59 PM	Helium valve opened
12/3/2011	5:33:59 PM	Helium MFC set to  500.000000
12/3/2011	5:33:59 PM	H2 MFC set to  0.000000
12/3/2011	5:33:59 PM	BCl3 MFC set to  0.000000
12/3/2011	5:33:59 PM	PHl3 MFC set to  0.000000
12/3/2011	5:33:59 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:33:59 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:33:59 PM	Tube furnace set to 0
12/3/2011	5:35:01 PM	Helium valve closed
12/3/2011	5:35:01 PM	H2 valve closed
12/3/2011	5:35:01 PM	BCl3 valve closed
12/3/2011	5:35:01 PM	PH3 valve closed
12/3/2011	5:35:01 PM	SiCl4 pre valve closed
12/3/2011	5:35:01 PM	SiCl4 post valve closed
12/3/2011	5:35:01 PM	Main Vac valve closed
12/3/2011	5:35:01 PM	Bypass valve closed
12/3/2011	5:35:01 PM	Bubbler valve closed
12/3/2011	5:35:01 PM	Helium MFC set to  0.000000
12/3/2011	5:35:01 PM	H2 MFC set to  0.000000
12/3/2011	5:35:01 PM	BCl3 MFC set to  0.000000
12/3/2011	5:35:01 PM	PHl3 MFC set to  0.000000
12/3/2011	5:35:01 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:35:01 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:35:01 PM	Tube furnace set to 0
12/3/2011	5:35:02 PM	Run finished at 5:35 PM
12/3/2011	5:35:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2011	5:43:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2011	5:43:03 PM	Recipe started at 5:43 PM
12/3/2011	5:43:03 PM	Helium valve closed
12/3/2011	5:43:03 PM	H2 valve closed
12/3/2011	5:43:03 PM	BCl3 valve closed
12/3/2011	5:43:03 PM	PH3 valve closed
12/3/2011	5:43:03 PM	SiCl4 pre valve closed
12/3/2011	5:43:03 PM	SiCl4 post valve closed
12/3/2011	5:43:03 PM	Main Vac valve closed
12/3/2011	5:43:03 PM	Bubbler valve closed
12/3/2011	5:43:03 PM	Bypass valve opened
12/3/2011	5:43:03 PM	Helium MFC set to  0.000000
12/3/2011	5:43:03 PM	H2 MFC set to  0.000000
12/3/2011	5:43:03 PM	BCl3 MFC set to  0.000000
12/3/2011	5:43:03 PM	PHl3 MFC set to  0.000000
12/3/2011	5:43:03 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:43:03 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:43:03 PM	Tube furnace set to 0
12/3/2011	5:44:38 PM	Helium valve closed
12/3/2011	5:44:38 PM	H2 valve closed
12/3/2011	5:44:38 PM	BCl3 valve closed
12/3/2011	5:44:38 PM	PH3 valve closed
12/3/2011	5:44:38 PM	SiCl4 pre valve closed
12/3/2011	5:44:38 PM	SiCl4 post valve closed
12/3/2011	5:44:38 PM	Main Vac valve closed
12/3/2011	5:44:38 PM	Bubbler valve closed
12/3/2011	5:44:38 PM	Bypass valve opened
12/3/2011	5:44:38 PM	Helium MFC set to  0.000000
12/3/2011	5:44:38 PM	H2 MFC set to  0.000000
12/3/2011	5:44:38 PM	BCl3 MFC set to  0.000000
12/3/2011	5:44:38 PM	PHl3 MFC set to  0.000000
12/3/2011	5:44:38 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:44:38 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:44:38 PM	Tube furnace set to 0
12/3/2011	5:45:38 PM	Helium valve closed
12/3/2011	5:45:38 PM	H2 valve closed
12/3/2011	5:45:38 PM	BCl3 valve closed
12/3/2011	5:45:38 PM	PH3 valve closed
12/3/2011	5:45:38 PM	SiCl4 pre valve closed
12/3/2011	5:45:38 PM	SiCl4 post valve closed
12/3/2011	5:45:38 PM	Bypass valve closed
12/3/2011	5:45:38 PM	Bubbler valve closed
12/3/2011	5:45:38 PM	Main Vac valve opened
12/3/2011	5:45:38 PM	Helium MFC set to  0.000000
12/3/2011	5:45:38 PM	H2 MFC set to  0.000000
12/3/2011	5:45:38 PM	BCl3 MFC set to  0.000000
12/3/2011	5:45:38 PM	PHl3 MFC set to  0.000000
12/3/2011	5:45:38 PM	SiCl4 MFC set to  0.000000
12/3/2011	5:45:38 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	5:45:38 PM	Tube furnace set to 0
12/3/2011	5:45:39 PM	Run finished at 5:45 PM
12/3/2011	5:45:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2011	7:14:36 PM	Main Vac valve closed
12/3/2011	7:16:56 PM	Recipe started at 7:16 PM
12/3/2011	7:16:56 PM	Helium valve closed
12/3/2011	7:16:56 PM	H2 valve closed
12/3/2011	7:16:56 PM	BCl3 valve closed
12/3/2011	7:16:56 PM	PH3 valve closed
12/3/2011	7:16:56 PM	SiCl4 pre valve closed
12/3/2011	7:16:56 PM	SiCl4 post valve closed
12/3/2011	7:16:56 PM	Bypass valve closed
12/3/2011	7:16:56 PM	Bubbler valve closed
12/3/2011	7:16:56 PM	Main Vac valve opened
12/3/2011	7:16:56 PM	Helium MFC set to  0.000000
12/3/2011	7:16:56 PM	H2 MFC set to  0.000000
12/3/2011	7:16:56 PM	BCl3 MFC set to  0.000000
12/3/2011	7:16:56 PM	PHl3 MFC set to  0.000000
12/3/2011	7:16:56 PM	SiCl4 MFC set to  0.000000
12/3/2011	7:16:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	7:16:56 PM	Tube furnace set to 0
12/3/2011	8:16:56 PM	Helium valve closed
12/3/2011	8:16:56 PM	H2 valve closed
12/3/2011	8:16:56 PM	BCl3 valve closed
12/3/2011	8:16:56 PM	PH3 valve closed
12/3/2011	8:16:56 PM	SiCl4 pre valve closed
12/3/2011	8:16:56 PM	SiCl4 post valve closed
12/3/2011	8:16:56 PM	Main Vac valve closed
12/3/2011	8:16:56 PM	Bypass valve closed
12/3/2011	8:16:56 PM	Bubbler valve closed
12/3/2011	8:16:56 PM	Helium MFC set to  0.000000
12/3/2011	8:16:56 PM	H2 MFC set to  0.000000
12/3/2011	8:16:56 PM	BCl3 MFC set to  0.000000
12/3/2011	8:16:56 PM	PHl3 MFC set to  0.000000
12/3/2011	8:16:56 PM	SiCl4 MFC set to  0.000000
12/3/2011	8:16:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	8:16:56 PM	Tube furnace set to 0
12/3/2011	8:16:59 PM	Helium valve closed
12/3/2011	8:16:59 PM	BCl3 valve closed
12/3/2011	8:16:59 PM	PH3 valve closed
12/3/2011	8:16:59 PM	SiCl4 pre valve closed
12/3/2011	8:16:59 PM	SiCl4 post valve closed
12/3/2011	8:16:59 PM	Main Vac valve closed
12/3/2011	8:16:59 PM	Bypass valve closed
12/3/2011	8:16:59 PM	Bubbler valve closed
12/3/2011	8:16:59 PM	H2 valve opened
12/3/2011	8:16:59 PM	Helium MFC set to  0.000000
12/3/2011	8:16:59 PM	H2 MFC set to  500.000000
12/3/2011	8:16:59 PM	BCl3 MFC set to  0.000000
12/3/2011	8:16:59 PM	PHl3 MFC set to  0.000000
12/3/2011	8:16:59 PM	SiCl4 MFC set to  0.000000
12/3/2011	8:16:59 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	8:16:59 PM	Tube furnace set to 0
12/3/2011	8:18:06 PM	Helium valve closed
12/3/2011	8:18:06 PM	BCl3 valve closed
12/3/2011	8:18:06 PM	PH3 valve closed
12/3/2011	8:18:06 PM	SiCl4 pre valve closed
12/3/2011	8:18:06 PM	SiCl4 post valve closed
12/3/2011	8:18:06 PM	Main Vac valve closed
12/3/2011	8:18:06 PM	Bypass valve closed
12/3/2011	8:18:06 PM	H2 valve opened
12/3/2011	8:18:06 PM	Bubbler valve opened
12/3/2011	8:18:06 PM	Helium MFC set to  0.000000
12/3/2011	8:18:06 PM	H2 MFC set to  500.000000
12/3/2011	8:18:06 PM	BCl3 MFC set to  0.000000
12/3/2011	8:18:06 PM	PHl3 MFC set to  0.000000
12/3/2011	8:18:06 PM	SiCl4 MFC set to  0.000000
12/3/2011	8:18:06 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	8:18:06 PM	Tube furnace set to 0
12/3/2011	8:18:07 PM	Helium valve closed
12/3/2011	8:18:07 PM	BCl3 valve closed
12/3/2011	8:18:07 PM	PH3 valve closed
12/3/2011	8:18:07 PM	SiCl4 pre valve closed
12/3/2011	8:18:07 PM	SiCl4 post valve closed
12/3/2011	8:18:07 PM	Main Vac valve closed
12/3/2011	8:18:07 PM	Bypass valve closed
12/3/2011	8:18:07 PM	H2 valve opened
12/3/2011	8:18:07 PM	Bubbler valve opened
12/3/2011	8:18:07 PM	Helium MFC set to  0.000000
12/3/2011	8:18:07 PM	H2 MFC set to  500.000000
12/3/2011	8:18:07 PM	BCl3 MFC set to  0.000000
12/3/2011	8:18:07 PM	PHl3 MFC set to  0.000000
12/3/2011	8:18:07 PM	SiCl4 MFC set to  0.000000
12/3/2011	8:18:07 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	8:18:08 PM	Tube furnace set to 1000
12/3/2011	8:43:08 PM	Helium valve closed
12/3/2011	8:43:08 PM	PH3 valve closed
12/3/2011	8:43:08 PM	Main Vac valve closed
12/3/2011	8:43:08 PM	Bypass valve closed
12/3/2011	8:43:08 PM	H2 valve opened
12/3/2011	8:43:08 PM	BCl3 valve opened
12/3/2011	8:43:08 PM	SiCl4 pre valve opened
12/3/2011	8:43:08 PM	SiCl4 post valve opened
12/3/2011	8:43:08 PM	Bubbler valve opened
12/3/2011	8:43:08 PM	Helium MFC set to  0.000000
12/3/2011	8:43:08 PM	H2 MFC set to  450.000000
12/3/2011	8:43:08 PM	BCl3 MFC set to  1.500000
12/3/2011	8:43:08 PM	PHl3 MFC set to  0.000000
12/3/2011	8:43:08 PM	SiCl4 MFC set to  50.000000
12/3/2011	8:43:08 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	8:43:08 PM	Tube furnace set to 1000
12/3/2011	9:28:08 PM	Helium valve closed
12/3/2011	9:28:08 PM	BCl3 valve closed
12/3/2011	9:28:08 PM	PH3 valve closed
12/3/2011	9:28:08 PM	SiCl4 pre valve closed
12/3/2011	9:28:08 PM	SiCl4 post valve closed
12/3/2011	9:28:08 PM	Main Vac valve closed
12/3/2011	9:28:08 PM	Bypass valve closed
12/3/2011	9:28:08 PM	H2 valve opened
12/3/2011	9:28:08 PM	Bubbler valve opened
12/3/2011	9:28:08 PM	Helium MFC set to  0.000000
12/3/2011	9:28:08 PM	H2 MFC set to  500.000000
12/3/2011	9:28:08 PM	BCl3 MFC set to  0.000000
12/3/2011	9:28:08 PM	PHl3 MFC set to  0.000000
12/3/2011	9:28:08 PM	SiCl4 MFC set to  0.000000
12/3/2011	9:28:08 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	9:28:08 PM	Tube furnace set to 750
12/3/2011	9:43:08 PM	H2 valve closed
12/3/2011	9:43:08 PM	BCl3 valve closed
12/3/2011	9:43:08 PM	PH3 valve closed
12/3/2011	9:43:08 PM	SiCl4 pre valve closed
12/3/2011	9:43:08 PM	SiCl4 post valve closed
12/3/2011	9:43:08 PM	Main Vac valve closed
12/3/2011	9:43:08 PM	Bypass valve closed
12/3/2011	9:43:08 PM	Helium valve opened
12/3/2011	9:43:08 PM	Bubbler valve opened
12/3/2011	9:43:08 PM	Helium MFC set to  500.000000
12/3/2011	9:43:08 PM	H2 MFC set to  0.000000
12/3/2011	9:43:08 PM	BCl3 MFC set to  0.000000
12/3/2011	9:43:08 PM	PHl3 MFC set to  0.000000
12/3/2011	9:43:08 PM	SiCl4 MFC set to  0.000000
12/3/2011	9:43:08 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	9:43:08 PM	Tube furnace set to 0
12/3/2011	10:03:08 PM	Helium valve closed
12/3/2011	10:03:08 PM	H2 valve closed
12/3/2011	10:03:08 PM	BCl3 valve closed
12/3/2011	10:03:08 PM	PH3 valve closed
12/3/2011	10:03:08 PM	SiCl4 pre valve closed
12/3/2011	10:03:08 PM	SiCl4 post valve closed
12/3/2011	10:03:08 PM	Main Vac valve closed
12/3/2011	10:03:08 PM	Bypass valve closed
12/3/2011	10:03:08 PM	Bubbler valve closed
12/3/2011	10:03:08 PM	Helium MFC set to  0.000000
12/3/2011	10:03:08 PM	H2 MFC set to  0.000000
12/3/2011	10:03:08 PM	BCl3 MFC set to  0.000000
12/3/2011	10:03:08 PM	PHl3 MFC set to  0.000000
12/3/2011	10:03:08 PM	SiCl4 MFC set to  0.000000
12/3/2011	10:03:08 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	10:03:08 PM	Tube furnace set to 0
12/3/2011	10:23:08 PM	Helium valve closed
12/3/2011	10:23:08 PM	H2 valve closed
12/3/2011	10:23:08 PM	BCl3 valve closed
12/3/2011	10:23:08 PM	PH3 valve closed
12/3/2011	10:23:08 PM	SiCl4 pre valve closed
12/3/2011	10:23:08 PM	SiCl4 post valve closed
12/3/2011	10:23:08 PM	Main Vac valve closed
12/3/2011	10:23:08 PM	Bubbler valve closed
12/3/2011	10:23:08 PM	Bypass valve opened
12/3/2011	10:23:08 PM	Helium MFC set to  0.000000
12/3/2011	10:23:08 PM	H2 MFC set to  0.000000
12/3/2011	10:23:08 PM	BCl3 MFC set to  0.000000
12/3/2011	10:23:08 PM	PHl3 MFC set to  0.000000
12/3/2011	10:23:08 PM	SiCl4 MFC set to  0.000000
12/3/2011	10:23:08 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	10:23:09 PM	Tube furnace set to 0
12/3/2011	10:24:35 PM	Helium valve closed
12/3/2011	10:24:35 PM	H2 valve closed
12/3/2011	10:24:35 PM	BCl3 valve closed
12/3/2011	10:24:35 PM	PH3 valve closed
12/3/2011	10:24:35 PM	SiCl4 pre valve closed
12/3/2011	10:24:35 PM	SiCl4 post valve closed
12/3/2011	10:24:35 PM	Main Vac valve closed
12/3/2011	10:24:35 PM	Bubbler valve closed
12/3/2011	10:24:35 PM	Bypass valve opened
12/3/2011	10:24:35 PM	Helium MFC set to  0.000000
12/3/2011	10:24:35 PM	H2 MFC set to  0.000000
12/3/2011	10:24:35 PM	BCl3 MFC set to  0.000000
12/3/2011	10:24:35 PM	PHl3 MFC set to  0.000000
12/3/2011	10:24:35 PM	SiCl4 MFC set to  0.000000
12/3/2011	10:24:35 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	10:24:35 PM	Tube furnace set to 0
12/3/2011	10:25:35 PM	Helium valve closed
12/3/2011	10:25:35 PM	H2 valve closed
12/3/2011	10:25:35 PM	BCl3 valve closed
12/3/2011	10:25:35 PM	PH3 valve closed
12/3/2011	10:25:35 PM	SiCl4 pre valve closed
12/3/2011	10:25:35 PM	SiCl4 post valve closed
12/3/2011	10:25:35 PM	Bypass valve closed
12/3/2011	10:25:35 PM	Bubbler valve closed
12/3/2011	10:25:35 PM	Main Vac valve opened
12/3/2011	10:25:35 PM	Helium MFC set to  0.000000
12/3/2011	10:25:35 PM	H2 MFC set to  0.000000
12/3/2011	10:25:35 PM	BCl3 MFC set to  0.000000
12/3/2011	10:25:35 PM	PHl3 MFC set to  0.000000
12/3/2011	10:25:35 PM	SiCl4 MFC set to  0.000000
12/3/2011	10:25:35 PM	Bypass solenoid MFC set to  0.000000
12/3/2011	10:25:35 PM	Tube furnace set to 0
12/3/2011	11:25:35 PM	Run finished at 11:25 PM
